From Duffing amplification to third-superharmonic isolation: dual nonlinear regimes for high-performance piezoelectric MEMS electric field sensing
本文提出了一种压电驱动的微机电系统(MEMS)电场传感器,该传感器利用三阶超谐波共振,通过非线性放大实现高灵敏度,并有效隔离信号与寄生电容馈通,从而获得卓越性能,进而克服了传统基于达芬方程(Duffing)设计中固有的动态范围限制。