Growth of (111)-textured SrTiO3 thin films on Pt(111)/Al2O3(1-102) substrates by rf magnetron sputter deposition
This study demonstrates that stoichiometric (111)-textured SrTiO3 thin films with high crystalline quality and sub-nanometer roughness can be successfully grown via rf magnetron sputtering on Pt(111)/Al2O3 substrates, particularly when the underlying platinum template is deposited at elevated temperatures to ensure highly ordered epitaxy.