Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing
This paper demonstrates that high-quality, low-loss niobium superconducting resonators can be fabricated in a dual-use chamber shared with magnetic materials by employing an acid-free resist strip process that achieves internal quality factors near one million, thereby enabling the integration of superconducting and magnetic systems without compromising device performance.