Multilayer Laue Lenses for Enhanced Spatial Resolution in Dark-Field X-ray Microscopy
This paper demonstrates that using crossed Multilayer Laue Lenses (MLLs) as objectives in Dark-Field X-ray Microscopy significantly enhances spatial resolution to 56 nm and increases numerical aperture by a factor of three compared to compound refractive lenses, thereby expanding the technique's capabilities for high-resolution bulk and near-surface imaging.