Tailoring the properties of YBaCuO thin films by 30 keV He irradiation: An enabling route to superconducting device nanopatterning
This study establishes quantitative fluence thresholds and a practical operational window for 30 keV He ion irradiation of YBaCuO thin films, demonstrating that controlled defect engineering via Frenkel pair generation—rather than oxygen depletion—enables precise superconducting property suppression and nanopatterning while maintaining structural integrity within a specific fluence range.