Low-loss Nb on Si superconducting resonators from a dual-use spintronics deposition chamber and with acid-free post-processing
This paper demonstrates that high-quality, low-loss niobium superconducting resonators can be fabricated in a dual-use chamber shared with magnetic materials by employing an acid-free resist strip process that achieves internal quality factors near one million, thereby enabling the integration of superconducting and magnetic systems without compromising device performance.
Maciej W. Olszewski, Jadrien T. Paustian, Tathagata Banerjee, Haoran Lu, Jorge L. Ramirez, Nhi Nguyen, Kiichi Okubo, Rohit Pant, Aleksandra B. Biedron, Daniel C. Ralph, Christopher J. K. Richardson, G (…)2026-06-04🔬 cond-mat.mtrl-sci